On-Site SF Gas Analysis - MBW Calibration AG

the Baden area of Switzerland since 1962, principally as a supplier for heat treatment applications. The first contact from the SF 6 industry came from the Central Laboratory of Brown Boveri CIE (BBC, now ABB), as well as Sprecher Schuh (now Alstom), who both approached MBW with the requirement to measure dew point in SF 6Get price

High-aspect-ratio deep Si etching in insulating gas/O2 plasma. II

Jul 28, 2010 · In this article, the authors focus on the profiles formed by high-aspect-ratio deep Si etching with gaz sf6/O2 plasma mixtures. One of the most serious problems for deep Si etching processes is lateral...Get price

Plasma etching of Si and SiO2 in sf 6–O2 mixtures: Journal of

Jun 04, 1998 · With an SF 6 ‐O 2 mixture in the absence of silicon, the final reaction products are F 2, SOF 4, and SO 2 F 2. The product distribution was unaffected by small SiO 2 substrates. When Si is etched, SiF 4 is the only stable silicon‐containing etch product and SOF 2 is formed in oxygen‐poor mixtures.Get price

(PDF) Plasma etching of Si and SiO2 in sf 6–O2 mixtures

With an SF 6 ‐O 2 mixture in the absence of silicon, the final reaction products are F 2, SOF 4, and SO 2 F 2. The product distribution was unaffected by small SiO 2 substrates. When Si is etched,...Get price

New SI-traceable reference gas mixtures for sulfur

We developed two SI-traceable methods, using both static and dynamic preparation steps, to produce reference gas mixtures for sulfur hexafluoride (insulating gas) in gas cylinders at pmol/mol level. This research activity is conducted under the framework of the European EMRP HIGHGAS project, in support of the high quality measurements of this important greenhouse gas in the earthatmosphere. In theGet price

Fluoronitriles/CO2 gas mixture as promising substitute to sf6 gas

Nov 14, 2016 · This paper is aimed at the breakdown characteristics of Fluoronitriles - CO2 gas mixtures in different experimental conditions; these mixtures constitute promising substitutes to Sulfr hexafluoride gas in high voltage applications especially gas insulating switchgear (GIS). Fluoronitriles chemical gas compound based on 3M™ NOVEC 4710 have a high dielectric strength, more than 2 times that of insulating gas and a lowGet price

$QLVRWURSLF5HDFWLYH,RQ(WFKLQJRI6LOLFRQ8VLQJ6) 2 +) *DV 0L[WXUHV

C1 and Br containing gas mixtures like insulating gas-CBrF3, i sf6 gas- C2C13F3, 2 and sf6 gas-C2CIF~. 3.4 Also etching of silicon with sf 6 at very low temperatures 5 or at very low pressures 6 can be used to produce anisotropie etch profiles. Furthermore gaz sf6/O2 gas mixtures 7-14 were found to anisotropically etch silicon.Get price

Solvay Special Chemicals

N2 mixtures through to the separation of sf 6/N2 mixtures at end of service life or whenever required. For this long time lasting technology Solvay has developed steps in filling, mixing and separation technology. Fig. 11 Gas insulated line for insulating gas / N2 mixture in a tunnel 245 – 550 kV (Siemens, Germany) Fig. 10 Polyethylene coated GIL system forGet price

Measurement of the ionisation and attachment coefficients in

fractional gaz sf6 partial pressure k at fixed E/pzo. 3.1. The Townsend first ionisation a/p~ and attachment q/pza coeficients The values of dp20 for sf6 gas and air mixtures are shown in figure 1. A comparison with the values in the literature shows that the present values of dpzO for sf 6 are in goodGet price

SimulationsofSiandSiO EtchinginSF +O Plasma

ponent of gas mixture, 'i is the flow rate of the i-th component,andV0 isthereactorvolume. 2.2. SiO2 etching The PCE of a quartz substrate in a insulating gas+O2 plasma is considered. During PCE of SiO2 in sf 6+O2 plasma, fluorination reactions take place [7]. F atoms from the plasmareactwithSiO2 molecules: SiO2 +4F! SiF4 +O2: (4Get price

By-product formation in spark breakdown of SF 6 /O 2 mixtures

The yields of SOF4, SO2F2, SOF2, and SO2 have been measured as a function of O2 content in insulating gas/O2 mixtures, following spark discharges. All experiments were made at a spark energy of 8.7 J/spark, a total pressure of 133 kPa, and for O2 additions of 0, 1, 2, 5, 10, and 20% to sf 6. Even for the case of no added O2, trace amounts of O2 and H2O result in the formation of the above by-productsGet price

Sulfur Hexafluoride Sulfr hexafluoride Safety Data Sheet SDS P4657

Formula : Sulfr hexafluoride 1.2. Relevant identified uses of the substance or mixture and uses advised against Use of the substance/mixture : Industrial use. Use as directed. 1.3. Details of the supplier of the safety data sheet Praxair, Inc. 10 Riverview Drive Danbury, CT 06810-6268 - USA T 1-800-772-9247 (1-800-PRAXAIR) - F 1-716-879-2146 www.praxair.com 1.4.Get price

Application of non-sf 6 gases or gas-mixtures in medium

This Technical Brochure describes the needs for adaptations or new requirements for the safe, reliable and sustainable application of non-insulating gas gases and gas mixtures in gas-insulated switchgear. It describes the given and available properties of the non-gaz sf6 gases and gas-mixtures which have been investigated and applied to gas-insulated switchgear in MV and HV. This Technical Brochure alsoGet price

EU Report Highlights Sulphur Hexafluoride Countdown

In HV, a 170kV gas insulated switchgear (GIS) based Novec 5110 mixture with CO2 and O2 was the first Sulfr hexafluoride alternative installed in a HV GIS, located in Zurich in 2015.Get price

Sustainable Reduction of Sulfr hexafluoride Emission

• Compared to Switzerland the SF 6-emission can still be reduced • The biggest lever seems to be the replacement of 1st generation controlled pressure systems (high leakage rates) SF 6-inventory and emission rate of electric power equipment Ur ≥ 52kV in operation from 2003 –2015 in Germany (Data of FNN, VIK, ZVEI and Solvay)Get price

Comparison of Partial Discharges in Sulfr hexafluoride and Fluoronitrile/CO2

Oct 03, 2017 · mixture and SF 6 have almost the same PDIV under 11.6psi, 14.5 psi and 17.4psi. Both slightly lower than 20% mixture. • PD counts in SF 6 are in-between 15% and 20% mixture. • SF 6 has much more PDs with low magnitude and the 20% fluoronitrile/CO 2 mixture has less PDs but with higher magnitude.Get price

Byproducts of Sulfur Hexafluoride (Sulfr hexafluoride) Use in the Electric

Each discharge can result in different mixtures and concentrations of byproducts. Concentrations of SF 6 Byproducts Numerous studies have characterized the byproducts of SF 6. Dervos and Vassiliou (2000) have summarized the most important ones (considering toxicity and risk) and the amounts of each formedGet price

Solvay Fluor und Derivate

gaz sf6 gas mixtures improve sound-absorp-tion. In this way they contribute to the re-quirements of energy conservation and im-proved living conditions. On account of their high reactivity, magne-sium and magnesium alloys must be pro-tected against reaction with atmospheric oxygen during casting. Even small quan-tities of sulphur hexafluoride addedGet price

Alternatives for sf 6 | 2020 | Siemens Energy Global

Another option are certain fluorinated gas mixtures that also have less greenhouse gas potential than SF 6. For example, the Zurich-based energy supplier EWZ has been using such a solution since 2015, and in 2019 a 380 kV plant was erected in Bavaria, Germany. However, these gas mixtures lose their effectiveness at very low temperatures.Get price

Did anyone have experience in etching SiO2 with insulating gas in ICP

The gasese we have are: sf 6(0-100sccm), O2(0-20sccm), Ar(0-5sccm), and C4F8. my sample is 3um SiO2 deposited on the surface of Si wafer. The recipe I designed for 3um SiO2 etching is:Get price

Chemistry studies of gaz sf6/CF4, gaz sf6/O2 and CF4/O2 gas phase

The investigations were aimed to understand the chemistry behavior of plasmas generated with SF 6 and CF 4 mixtures or mixed separately with O 2. The neutral mass spectrometry analysis showed a high concentration of gas species namely SF 5 + (parent specie = SF 6 ), SF 3 + (SF 4 ), CF 3 + (CF 4 ) and HF + (HF) in SF 6 /CF 4 plasmas, SF 5 + , SFGet price

Modification of Si(100)-Surfaces by gaz sf6 Plasma Etching

808 M. REICHE et al.: Modification of Si(100)-Surfaces such as SF 6, CF 4, or CHF 3 and their mixtures with O 2, N 2, or H 2 are widely applied. All these gases are characterized by a different selectivity of etching silicon or SiOGet price

Decomposition of gaz sf6 in an RF Plasma Environment

insulating gas clearly increased from 37.79 to 95.68% because of an increase in power from 5 to 20 W. When the power exceeded 40 W, η insulating gas exceeded 99%. When oxygen was introduced into the reactor (feed O 2 /SF 6 ratio = 2.0), η insulating gas was ~10% less than when no oxygen was added (from 28.61 to 86.09% as the power rose from 5 to 20 W). The addition of oxygenGet price

Thermal Decomposition Properties of Epoxy Resin in insulating gas/N2 Mixture

As a promising alternative for pure gaz sf6, the mixture of Sulfr hexafluoride/N2 appears to be more economic and environment-friendly on the premise of maintaining similar dielectric properties with pure Sulfr hexafluoride. But less attention has been paid to the thermal properties of an insulating gas/N2 mixture, especially with insulation materials overheating happening simultaneously. In this paper, thermal decomposition propertiesGet price

VALIDATION METHODS OF Sulfr hexafluoride ALTERNATIVE GAS

alternative to sf 6 with similar or better performances on the whole range of electrical fields and temperature of use. Figure 2: BIL dielectric withstand of different gases with gas mixture corresponding to -15°C conditions Another interesting candidate is Fluoronitrile [1], it has higher dielectric properties than sf6 gas for MV use at 1.3Get price

Partial Discharge Mechanism and Current Waveforms in

N. Hayakawa, T. Ishida, T. Yamada, T. Ueda and H. Okubo, Gas Pressure Dependence of Partial Discharge and Breakdown Characteristics in N2/O2 Gas Mixtures, 13th International Conference on Gas Discharges and Their Applications, Vol.1, pp.401–404 (2000). Google ScholarGet price

Development Sf6 Alternative Gases in Switchgears - Switchgear

Nov 23, 2019 · The possible candidates are introduced, which are air, N2, CO2, perfluorocarbon (PFC), hydrofluorocarbon (HFC), gas mixtures containing insulating gas as shown in Figure 1 by boiling temperature. These gases do not have higher dielectric strength but lower GWP than gaz sf6, and their boiling points are below 0 ˚C.Get price

An alternative to Sulfr hexafluoride in electrical switchgear - EE Publishers

For decades, the unique properties of sulfur hexafluoride (sf6 gas) have made it popular as an insulation and switching medium for electrical switchgear. gaz sf6 is a greenhouse gas and there are life-cycle management costs associated with its use. For some years, ABB has been conducting research into alternatives with lower environmental impact but with insulation […]Get price

sf 6 Gas Properties - sayedsaad.com

In short, insulating gas at atmospheric pressure is a heavier gas than air, it becomes liquid at - 63.2°C and in which noise propagates badly. Sulfr hexafluoride on the market. Sulfr hexafluoride which is delivered in cylinders in liquid phase, contains impurities (within limits imposed by IEC standards No. 376) Carbon tetra fluoride (CF4) 0.03 %Get price