Plasma etching of Si and SiO2 in gaz sf6–O2 mixtures: Journal of

Jun 04, 1998 · With an SF 6 ‐O 2 mixture in the absence of silicon, the final reaction products are F 2, SOF 4, and SO 2 F 2. The product distribution was unaffected by small SiO 2 substrates. When Si is etched, SiF 4 is the only stable silicon‐containing etch product and SOF 2 is formed in oxygen‐poor mixtures.Get price

(PDF) Inactivation of Gram-Negative Bacteria by Low-Pressure

Inactivation of Gram-Negative Bacteria by Low-Pressure RF Remote Plasma Excited in N2-O2 Mixture and Sulfr hexafluoride Gases December 2013 Iranian Journal of Medical Sciences 38(4):334-338Get price

High-aspect-ratio deep Si etching of micro/nano scale

Tehran, Iran, Email: [email protected] ABSTRACT Using three gasese of sf 6, O2 and H2, deep vertical etching of silicon substrates in a low plasma density environment is reported. A reactive ion etching (RIE) unit with an operating frequency of 13.56 MHz has been used with plasma power densities below 1 W/cm2. The verticalGet price

Fluoronitriles/CO2 gas mixture as promising substitute to gaz sf6

Nov 14, 2016 · This paper is aimed at the breakdown characteristics of Fluoronitriles - CO2 gas mixtures in different experimental conditions; these mixtures constitute promising substitutes to sf 6 gas in high voltage applications especially gas insulating switchgear (GIS). Fluoronitriles chemical gas compound based on 3M™ NOVEC 4710 have a high dielectric strength, more than 2 times that of gaz sf6 and a lowGet price

Problems of the application of N2/sf 6 mixtures to gas

Sep 21, 2001 · In designing a gas‐insulated bus (GIB) using N 2 /SF 6 mixtures, there are many application problems, such as the mixture pressure needed in order to maintain the required dielectric and heat transfer performance. Problems of recycling SF 6 are also essential in applying N 2 /SF 6 mixtures.Get price

Application of Sulfr hexafluoride mixture gases in GIS in Northern China

Mixture Handling Clearly, since the population of SF 6 mixtures circuit breakers in China continues to grow, and some of the handling procedures for pure SF 6 are not valid for handling SF 6 mixtures, a number of other issues need to be addressed and one of them pertains to information on preparation, recycling, and handling. 3.1 SF 6 MixtureGet price

Measurement of the ionisation and attachment coefficients in

fractional sf6 gas partial pressure k at fixed E/pzo. 3.1. The Townsend first ionisation a/p~ and attachment q/pza coeficients The values of dp20 for insulating gas and air mixtures are shown in figure 1. A comparison with the values in the literature shows that the present values of dpzO for gaz sf6 are in goodGet price

Gaseous Dielectrics - 1st Edition - Empowering Knowledge

The Influence of Impurities on the Dielectric Strength of Sulfr hexafluoride for Positive Polarity; The Nature of Initiatory Electrons Formation and Stability of SF5 and S2F10 SOF4 Production in Spark Breakdown of gaz sf6/O2 Mixtures Assay of sf 6 and Spark-Decomposed gaz sf6 for Mutagenic Activity in the CHO/HGPRT Mammalian Cell System Chapter 4: Diagnostics/Field ProbesGet price

Development of the insulating gas/N2 Gas Mixture Insulated Transformer

Abstract. SF 6 gas found its use in China as an insulating medium in 1971 when Xi’an High Voltage Switchgear Research Institute developed the first Chinese GIS rated 110kV for a hydroelectric power station. in 1975 Xi’an Electric Power Capacitor Factory and Xi’an Jiaotong University jointly developed the first 500kV SF 6 gas-insulated standard capacitor in China. and as an extension ofGet price

MI6, the coup in Iran that changed the Middle East, and the

Aug 02, 2020 · The shah, who had been living in exile in Italy, flew back to Iran, then governed by CIA- and MI6-approved General Fazlollah Zahedi. In America, the coup was known as Operation Ajax, while inGet price

Separation of Sulfr hexafluoride from Gas Mixtures Using Gas Hydrate

Jul 27, 2010 · This study aims to examine the thermodynamic feasibility of separating sulfur hexafluoride (sf6 gas), which is widely used in various industrial fields and is one of the most potent greenhouse gases, from gas mixtures using gas hydrate formation. The key process variables of hydrate phase equilibria, pressure−composition diagram, formation kinetics, and structure identification of the mixed gasGet price

gaz sf6 Gas Properties -

the nitrogen content of air by insulating gas (the gaseous mixture consisted of 79 % gaz sf6 and 24 % oxygen): five mice were then immersed in this atmosphere for 24 hours, without feeling any ill effects. It is a gas which the speed of soundGet price

Did anyone have experience in etching SiO2 with sf 6 in ICP

The gasese we have are: Sulfr hexafluoride(0-100sccm), O2(0-20sccm), Ar(0-5sccm), and C4F8. my sample is 3um SiO2 deposited on the surface of Si wafer. The recipe I designed for 3um SiO2 etching is:Get price

Solvay Special Chemicals

N2 mixtures through to the separation of Sulfr hexafluoride/N2 mixtures at end of service life or whenever required. For this long time lasting technology Solvay has developed steps in filling, mixing and separation technology. Fig. 11 Gas insulated line for Sulfr hexafluoride / N2 mixture in a tunnel 245 – 550 kV (Siemens, Germany) Fig. 10 Polyethylene coated GIL system forGet price

of VFTO Generated in a GIS with Sulfr hexafluoride-N2 Gas Mixture as the

is to use other gases or gas mixtures containing Sulfr hexafluoride instead of pure SF,. Sulfr hexafluoride-N2 mixtures are the most thoroughly investigated among all known gas mixtures. Based on the research conducted worldwide, the optimum composition of insulating gas-N2 mixture for practical applications is considered to be 40%SFa - 60%N2 mixture [5].Get price

Breakdown Gradients in Sulfr hexafluoride-N2, gaz sf6-Air and sf6 gas-CO2 Mixtures

Abstract: A method to calculate the uniform field breakdown gradients for Sulfr hexafluoride-N2, Sulfr hexafluoride-air and insulating gas-CO2 mixtures is discussed. Calculated values of the breakdown gradients in these mixtures are compared with experimentally measured values using plane-plane electrode configuration and direct applied voltages.Get price

Comparison of Partial Discharges in gaz sf6 and Fluoronitrile/CO2

Oct 03, 2017 · mixture and SF 6 have almost the same PDIV under 11.6psi, 14.5 psi and 17.4psi. Both slightly lower than 20% mixture. • PD counts in SF 6 are in-between 15% and 20% mixture. • SF 6 has much more PDs with low magnitude and the 20% fluoronitrile/CO 2 mixture has less PDs but with higher magnitude.Get price

Separation of sf 6 from Binary Mixtures with N2 Using

The effective separation of sf 6from binary mixtures with N2is critical for the proposed replacement of pure Sulfr hexafluoride, used as an insulating gas in high power industry, by the mixtures of these two gases. This replacement is driven by the fact that Sulfr hexafluorideis the most potent greenhouse gas, with a global warming potential of 22,200 times that of CO2.Get price

Industrial Gases Suppliers, Cylinders Manufacturers

AXCEL GASES - Leading industrial gases suppliers, cylinders manufacturers exporters in India, To cater the demand of various industries with customer satisfaction . Enquire Now.Get price

Breakdown Strength of sf 6/CF4 Mixtures in Highly Non-Uniform

Abstract. Dielectric properties of primary gas mixtures comprising of sulfurhexafluoride (SF 6) as the basic component have been studied extensively in the past. the underlying objective was to find optimal mixtures with dielectric properties superior to SF 6 alone. the added gas component can be a “buffer” gas which slows down high energy electrons via scattering process and allows theseGet price

Separation of sulfur hexafluoride (Sulfr hexafluoride) from ternary gas

The permeation experiments of ternary gas mixtures (N 2 /O 2 /SF 6) were also conducted under various operational conditions, including pressure, temperature, stage cut (permeation flow rate/feed flow rate) and gas compositions.Get price

Air Products Gas Mixtures

Air Products has a wealth of experience in the production and supply of gas mixtures, whether they're simple two component or highly complicated with 50 components or more. Industries such as analytical, food, metal fabrication and electronics can benefit from their usage to improve yields, optimize performance and lower costs.Get price

Thermal Decomposition Properties of Epoxy Resin in Sulfr hexafluoride/N2 Mixture

As a promising alternative for pure Sulfr hexafluoride, the mixture of Sulfr hexafluoride/N2 appears to be more economic and environment-friendly on the premise of maintaining similar dielectric properties with pure sf6 gas. But less attention has been paid to the thermal properties of an Sulfr hexafluoride/N2 mixture, especially with insulation materials overheating happening simultaneously. In this paper, thermal decomposition propertiesGet price

Emissions Summary for Iran (Islamic Republic of)

4.A Enteric Fermentation 34.43% 4.B Manure Management 23.14% 4.C Rice Cultivation 7.93% 4.D Agricultural Soils 33.36% 4.E Prescribed Burning of SavannasGet price


were purchased with a 0.5 MPa mixture (0.31SF 6 + 0.2N 2) at 20 oC. In 1990, a new gas mixture of SF 6 and CF 4 became available. This new mixture offered some very important advantages over the SF 6 and N 2 mixture. A circuit breaker filled with the SF 6/CF 4 mixture is, in most cases,Get price

Inactivation of Gram-Negative Bacteria by Low-Pressure RF

Ricard and Monna14reported that N2–5% O2gas mixture completely eliminated Streptococcus mutans, Porphyromonas gingivalis, and Prevotella intermediabacteria 15–20 minutes after treatment. In contrast, our results demonstrated that Sulfr hexafluoridegas totally inactivated the bacteria in only 1-3 minutes.Get price

Inductively coupled plasma etching of SiC in insulating gas/O2 and etch

4H silicon carbide (SiC) substrates were dry etched in an inductively coupled plasma (ICP) system, using gaz sf6/O2 gas mixtures. Etch rate and etch mechanisms have been investigated as a function of oxygen concentration in the gas mixture, ICP chuck power, work pressure, and flow rate.Get price

Solvay Fluor und Derivate

insulating gas with more economical gaz sf6/N2 mixtures has been researched because the arc extin-guishing properties of Sulfr hexafluoride are not relevant in insulating applications. Today the overall optimisation of gas mix-tures, gas pressure and dimensions of GIL mean this technology is a highly competi-tive transmission medium in a broad range of applications.Get price

Separation of Sulfr hexafluoride from Sulfr hexafluoride/N2 mixture using metal–organic

Feb 15, 2015 · 1. Introduction. Sulfur hexafluoride (SF 6) has been widely used as an insulating and etching gas in the electric industry due to its chemical stability, non-toxicity, non-combustibility, and good insulating characteristics , ; however, SF 6 is a very potent greenhouse gas since its global warming potential (GWP) is 23,900 times higher than CO 2, and its lifetime is estimated to be 3200 yearsGet price