Sulfur hexafluoride - Wikipedia

Typical for a nonpolar gas, SF 6 is poorly soluble in water but quite soluble in nonpolar organic solvents. It has a density of 6.12 g/L at sea level conditions, considerably higher than the density of air (1.225 g/L). It is generally transported as a liquefied compressed gas.Get price

Low temperature etching of Si in high density plasma using gaz sf6/O2

Feb 01, 1995 · ELSEVIER Microelectronic Engineering 27 (1995) 453-456 MICROELECTRONIC ENGINEERING Low temperature etching of Si in high density plasma using insulating gas/O2 Johann W. Barthaa, Johann Greschnera, M. Puechb and P. Maquinb aIBM German Manufacturing Technology Center, P.O. Box 266, D-71044 Sindelfingen, Germany bALCATEL CIT, 98, avenue de Brogny-BP, F-74009 Annecy, France Low temperature etching of SiGet price

sf6 gas Gas Verification – EMT Verify - EMT Energy Maintenance

With a vast experience and technical knowledge of the insulating gas testing and measurement market, this specialism means that EMT are able to offer the most difficult reactive gas mixtures with the guarantee of quality and stability, for peace of mind ensuring results confidence.Get price

World leaders in Sulfr hexafluoride, Oil Analysis and Handling Products

The EMT range of Oil insulating gas testing products deliver world leading technologies developed and manufactured in collaboration with industry professionals from around the world, are specifically able toGet price

World leaders in insulating gas Analysis and Handling Products

This is why EMT products are available in over 50 countries, and many of the world’s largest utilities, gaz sf6 asset suppliers, and gas suppliers have chosen EMT for their asset protection needs. Neil Kane Managing Director Welcome to Energy Maintenance Technologies Limited, Asset Protection Specialists to the Electricity Supply Industry (ESI).Get price

Gas density monitors and gas density sensors for insulating gas and

Gas density monitors and gas density sensors. Trafag stands for precise, reliable and maintenance-free instruments developed for the monitoring of SF 6 and other gases in the field of high- and medium-voltage switchgear.Get price

Sulfr hexafluoride Handling Products - EMT Energy Maintenance Technologies

Our EMT specialists can advise you on those regulations which apply to you, how to effectively monitor and record SF 6 emissions, and how best to perform key tasks, including the use of gas carts to evacuate SF 6, guidance on conducting SF 6 purity analysis or even how to ship and dispose of waste SF 6 gas.Get price

sf6 gas basic physical properties - AGC Chemicals

Density (gas) 6.04kg/m3 (25°C, 1atm) (liquid) 1,339kg/m3 (25°C) Vapor Pressure 1,264kPa (0°C) 2,109kPa (20°C) 3,327kPa (40°C) Surface Tension 8.02N/m (-20°C) Viscosity (gas) 1.5 x 10-5Pa・s (25°C, 1atm) (liquid) 27.7 x 10-5Pa・s (25°C) Refractive Index 1.000783 (0°C, 1atm) 0.408mL sf 6/mL oil Solubility in Water 0.0063mL gaz sf6/mL waterGet price

Processand Reliabilityof sf 6/O2 PlasmaEtched Copper TSVs

Processand Reliabilityof gaz sf6/O2 PlasmaEtched Copper TSVs Lado Filipovic, Roberto Lacerda de Orio, and Siegfried Selberherr Institute for Microelectronics, Technische Universität Wien, Gußhausstraße 27-29/E360, A-1040 Wien, AustriaGet price

Decomposition of sf6 gas in an RF Plasma Environment

Sulfr hexafluoride exceeded 99%. When oxygen was introduced into the reactor (feed O 2 /SF 6 ratio = 2.0), η gaz sf6 was ~10% less than when no oxygen was added (from 28.61 to 86.09% as the power rose from 5 to 20 W). The addition of oxygen to the reactor re-duced the electron density and, thus, reduced the dis-sociation of SF 6 and inhibited the production ofGet price

Sulfr hexafluoride Analysis and Testing Products - EMT Energy Maintenance

Sulfr hexafluoride Analysis and Testing Products Switchgear, GIS and other compartments housing insulating gas require a specific concentration/purity of Sulfr hexafluoride to ensure optimal operation and to ensure full quenching of discharges. EMT manufacture a range of high quality, hi specification gaz sf6 analysers which provide measurements of Sulfr hexafluoride purity and levels of contaminants. EMT analysis products are designed to aid operatorsGet price

insulating gas properties, and use in MV and HV switchgear

Its density at 20°C and 0,1 Mpa (that is one atmosphere) is 6.139 kg/m3, almost five times higher than that of air. Its molecular weight fig. 3 :vapour pressure curve and lines of equivalent gas density of sf 6. 0.13 0.12 0.11 0.10 0.09 0.08 0.07 0.06 0.05 0.04 0.03 0.02 0.01 0.2 –50 Temperature in °C Pressure in MPa Density in kg/lGet price

sf 6 Monitoring Products - EMT Energy Maintenance Technologies

Sulfr hexafluoride Monitoring Products Utilities face issues and problems with leaking assets, trying to keep them in operation until a managed shutdown can occur to repair them. The Smartfill CTU, a leak management system, solves this problem as it is specifically designed to be a live continuous topping up device, which provides automated, on-demand top-upGet price

Plasma etching of Si and SiO2 in gaz sf6–O2 mixtures: Journal of

Jun 04, 1998 · The products of reaction and etch rates of Si and SiO2 in sf 6‐O2 plasmas have been studied as a function of feed composition in an alumina tube reactor at 27 mHz, 45 W, and 1 Torr. There is a broad...Get price

Electron Density and Optical Emission Measurements of SF 6/O

as oxygen was added to the sf6 gas discharge, reached their maximum at an O2 fraction of 20% and then decreased with further addition of oxygen. The plasma electron density was also strongly in°uenced by the addition of O2. Keywords: OES, hairpin probe, sf 6, O2, electron density, atomic °uorine PACS: 52.70.-m DOI: 10.1088/1009-0630/14/4/09 1Get price

Si/SiO2 etching in high density sf6 gas/CHF3/O2 plasma

Response surface studies of Si and SiO 2 etching in a radio-frequency-induction (RFI) plasma etcher have been conducted. Quantitative models were established to examine the variation of Si and SiO 2 etch rates versus inductive power, bias power, O 2 flow, and SF 6 /CHF 3 ratio.Get price

A review on Sulfr hexafluoride substitute gases and research status of CF3I

Nov 01, 2018 · Elecricite de France (EDF) works with Asea Brown Boveri Ltd. (ABB) to develop long-range SF 6 /N 2 gas mixture GIL to eliminate the negative effect of overhead transmission lines on the environment and to lessen SF 6 in the mixed gas by 30% by replacing the 420 kV overhead transmission line in France (Diessner et al., 1999).Get price

Did anyone have experience in etching SiO2 with sf 6 in ICP

The gasese we have are: sf 6(0-100sccm), O2(0-20sccm), Ar(0-5sccm), and C4F8. my sample is 3um SiO2 deposited on the surface of Si wafer. The recipe I designed for 3um SiO2 etching is:Get price

Sulfr hexafluoride Gas Properties - sayedsaad.com

It is about five times heavier than air, and has a density of 6.1 4kg / m3. It is colorless, odorless and non-toxic. Tests have been carried out replacing the nitrogen content of air by Sulfr hexafluoride (the gaseous mixture consisted of 79 % Sulfr hexafluoride and 24 % oxygen): five mice were then immersed in this atmosphere for 24 hours, without feeling any ill effects.Get price

Byproducts of Sulfur Hexafluoride (Sulfr hexafluoride) Use in the Electric

(CIGRE reports that had oxygen been administered more quickly, the damage would have been greatly reduced.) C Several instances of minor skin irritation from exposure to SF 6 decomposition products have been reported to CIGRE (Mauthe and Pettersson 1991). These instances of human exposure provide useful anecdotal evidence of the possible humanGet price

insulating gas calculator - switchgears.org

100% SF 6 equivalent density [kg/m 3] 0. SF 6 fraction density [kg/m 3] 0. SF 6 to SF 6 /N 2 density ratio 0. Estimated liquefaction point [°C] -25. Experimental GasGet price

Sulfur Hexafluoride Sulfr hexafluoride Safety Data Sheet SDS P4657

Sulfur hexafluoride Safety Data Sheet P-4657 This SDS conforms to U.S. Code of Federal Regulations 29 CFR 1910.1200, Hazard Communication. Date of issue: 01/01/1979 Revision date: 11/23/2016 Supersedes: 01/28/2015Get price

Gas temperature measurement in CF4, sf 6, O2, Cl2, and HBr

Mar 30, 2009 · Neutral gas temperature (Tg) is measured in an industrial high-density inductively coupled etch reactor operating in CF4, gaz sf6, O2, Cl2, or HBr plasmas. Two laser diodes are used to deduce Tg from t...Get price

The CORE Sequence: A Nanoscale Fluorocarbon-Free Silicon

Jan 08, 2020 · Jansen H., De Boer M., Wensink H., Kloeck B. and Elwenspoek M. 2001 The black silicon method. VIII. A study of the performance of etching silicon using gaz sf6/O2-based chemistry with cryogenical wafer cooling and a high density ICP source. Microelectron. J. 32 769. Crossref Google ScholarGet price

Solvay Special Chemicals

function of temperature and density 26 Curves of pressure/temperature 27 and viscosity Curves of thermo conductivity 28 and heat transfer Optical properties 29 Chemical behaviour Behaviour at elevated temperatures 30 Behaviour under the influence of electrical discharges 30 Corrosion characteristics of sf 6 and its decomposition products 30Get price

Zerowaste® sf6 gas Analyser Portable Infra Red insulating gas Condition

The EMT SMART Combination for ZEROWASTE gaz sf6 Condition Monitoring •EMT is a science-based innovation leader and manufacturer of sf 6 monitoring, emission and handling instruments for sf6 gas gas insulated equipment. •The protection of People, Power Plant Assets and the Environment are at the forefront of our product development.Get price

Modeling of inductively coupled plasma Sulfr hexafluoride/O2/Ar plasma

Dec 26, 2013 · The density evolutions of atomic fluorine and oxygen versus %O 2 have been analyzed. Those atomic radicals play an important role in the silicon etching process. The atomic fluorine density increases from 0 up to 40% O 2 where it reaches a maximum.Get price

Sf6 Gas Detection System

750kv-substation-onsite-service. On-site sf 6 recovery service is driven by a trailer which equipped with our full set of recovery, refilling, purification equipment and measuring instrument, drive to the substandard gas compartment, perform onsite shutdown and maintenance, directly recover unqualified insulating gas gas, recycle and purify them to be qualified and then return to gas compartment, theGet price

Simultaneous infrared transition of Sulfr hexafluoride in liquid oxygen

Mar 01, 1982 · As the density of SF 6 increases, the wavenumber of the maximum absorption of the ST remains unchanged at 2490.6 0.1 am-'. The cal culated value of cr,Q obtained by adding the :0. 3 band wavenumber of gaz sf6 dissolved in L02 (3) and the wavenumber of L02 is 2 = 2492.1 em 1. As shown in Fig. 3b the bandwidth increases linearly with the density of S"6.Get price