(PDF) Plasma etching of Si and SiO2 in gaz sf6–O2 mixtures

A combination of gas-chromatographic, mass spectrometric and infrared spectrophotometric techniques has shown the presence of gaz sf6, SO2F2, SOF4, SOF2, SiF4 and F2 in the gas mixtures examined.Get price

High-aspect-ratio deep Si etching in sf 6/O2 plasma. II

Jul 28, 2010 · In this article, the authors focus on the profiles formed by high-aspect-ratio deep Si etching with sf6 gas/O2 plasma mixtures. One of the most serious problems for deep Si etching processes is lateral...Get price

Oxidation of sulfur hexafluoride - ScienceDirect

Metal explosions in gaz sf6 and oxygen* Reaction Relative extent of reaction (per cent)t 0.1 mg Pt 3 mg Cu Sulfr hexafluoride+2 --- SOF4 + F2 53 46 Sulfr hexafluoride+2 --- SOF2 + 2F2 33 38 sf 6+O2 -- SO2Fz + 2F2 12 14 sf6 gas + 02 --- SO2 + 3F2 1.4 1-9 *In all runs the initial SE6 and oxygen partial pressures were approxi- mately equal and were generally'in the range 220 to 230Get price

New SI-traceable reference gas mixtures for sulfur

We developed two SI-traceable methods, using both static and dynamic preparation steps, to produce reference gas mixtures for sulfur hexafluoride (insulating gas) in gas cylinders at pmol/mol level. This research activity is conducted under the framework of the European EMRP HIGHGAS project, in support of the high quality measurements of this important greenhouse gas in the earthatmosphere. In theGet price

Solvay Special Chemicals

N2 mixtures through to the separation of sf6 gas/N2 mixtures at end of service life or whenever required. For this long time lasting technology Solvay has developed steps in filling, mixing and separation technology. Fig. 11 Gas insulated line for Sulfr hexafluoride / N2 mixture in a tunnel 245 – 550 kV (Siemens, Germany) Fig. 10 Polyethylene coated GIL system forGet price

Plasma etching of Si and SiO2 in Sulfr hexafluoride–O2 mixtures: Journal of

Jun 04, 1998 · With an SF 6 ‐O 2 mixture in the absence of silicon, the final reaction products are F 2, SOF 4, and SO 2 F 2. The product distribution was unaffected by small SiO 2 substrates. When Si is etched, SiF 4 is the only stable silicon‐containing etch product and SOF 2 is formed in oxygen‐poor mixtures.Get price

Sulphur Hexafluoride - Its properties and Use as a Gaseous

sf6 gas is non-toxic and non-corrosive. Rats exposed to 8~% gaz sf6-20% O2 mixtures for two hours were unaffected2. Tests by Allied Chemical Co.3, Csmilli, Gordon and Plump2 and others, have shown pure sf 6 is physiologically safe. As sf 6 isGet price

SimulationsofSiandSiO EtchinginSF +O Plasma

ponent of gas mixture, 'i is the flow rate of the i-th component,andV0 isthereactorvolume. 2.2. SiO2 etching The PCE of a quartz substrate in a sf6 gas+O2 plasma is considered. During PCE of SiO2 in sf 6+O2 plasma, fluorination reactions take place [7]. F atoms from the plasmareactwithSiO2 molecules: SiO2 +4F! SiF4 +O2: (4Get price

Specialty Gases

mixtures and appropriate gas handling equipment such as efficient pressure regulators and customized gas supply systems. In this catalog we present the broad range of our product lines and services. We also provide a wealth of important and useful information on the safe handling of our products. Should you have any furtherGet price

Measurement of the ionisation and attachment coefficients in

fractional Sulfr hexafluoride partial pressure k at fixed E/pzo. 3.1. The Townsend first ionisation a/p~ and attachment q/pza coeficients The values of dp20 for insulating gas and air mixtures are shown in figure 1. A comparison with the values in the literature shows that the present values of dpzO for Sulfr hexafluoride are in goodGet price

Fluoronitriles/CO2 gas mixture as promising substitute to gaz sf6

Nov 14, 2016 · This paper is aimed at the breakdown characteristics of Fluoronitriles - CO2 gas mixtures in different experimental conditions; these mixtures constitute promising substitutes to sf6 gas gas in high voltage applications especially gas insulating switchgear (GIS). Fluoronitriles chemical gas compound based on 3M™ NOVEC 4710 have a high dielectric strength, more than 2 times that of sf 6 and a lowGet price

Application of non-Sulfr hexafluoride gases or gas-mixtures in medium

This Technical Brochure describes the needs for adaptations or new requirements for the safe, reliable and sustainable application of non-insulating gas gases and gas mixtures in gas-insulated switchgear. It describes the given and available properties of the non-sf6 gas gases and gas-mixtures which have been investigated and applied to gas-insulated switchgear in MV and HV. This Technical Brochure alsoGet price

Gaseous Dielectrics - 1st Edition - Empowering Knowledge

The Influence of Impurities on the Dielectric Strength of sf 6 for Positive Polarity; The Nature of Initiatory Electrons Formation and Stability of SF5 and S2F10 SOF4 Production in Spark Breakdown of insulating gas/O2 Mixtures Assay of Sulfr hexafluoride and Spark-Decomposed insulating gas for Mutagenic Activity in the CHO/HGPRT Mammalian Cell System Chapter 4: Diagnostics/Field ProbesGet price

(PDF) Characteristics of g3 – an alternative to insulating gas

Finally, a full-scale, 420/550 kV rated GIB demonstrator, filled with sf6 gas first and then with the 20% C3F7CN / 80% CO2 gas mixture, was subjected to type tests of various voltage waveforms inGet price

EU Report Highlights Sulphur Hexafluoride Countdown

GIS using a Novec 4710, CO2 and O2 mixture was first installed in a 145kV GIS in 2017, and is now used at 15 sites with a total of 100 bays. 72.5kV and 145kV GIS using synthetic air as insulating media together with vacuum interrupter for circuit-breaking have been available since 2016.Get price

Gas Mixtures Gas Blends - Linde US

And with decades of experience in producing mixtures, we apply all the highest safety and quality standards to every blend we create. ExtendaPak ® Food Gas Mixtures Composed of nitrogen, oxygen and/or carbon dioxide, ExtendaPak® food gas mixtures greatly reduce microbial growth, delay spoilage and slow enzymatic and biochemical degradation.Get price

Separation of gaz sf6 from Gas Mixtures Using Gas Hydrate

This study aims to examine the thermodynamic feasibility of separating sulfur hexafluoride (sf 6), which is widely used in various industrial fields and is one of the most potent greenhouse gases, from gas mixtures using gas hydrate formation. The key process variables of hydrate phase equilibria, pressure−composition diagram, formation kinetics, and structure identification of the mixed gasGet price

Journal of Physics: Conference Series OPEN ACCESS Related

micromachining of silicon using an sf 6/O2 inductively coupled plasma F Jiang, A Keating, M Martyniuk et al.-Low-pressure nonequilibrium plasma for a top-down nanoprocess Toshiaki Makabe and Takashi Yagisawa-Recent citations Electron collision cross sections of CHF 3 and electron transport in CHF 3 and CHF 3 Ar mixtures Satoru Kawaguchi et al-Get price

ophthalmic gases – sf6, c2f6 and c3f8 - ophthafutur

sf6, c2f6 and c3f8 are offered for single use application. The gases are easy to handle and to apply. sf6, c2f6 and c3f8 support post surgical tamponading of the retina. High purity. Improved convenience. Adjustable gas concentration. Environmental friendly. Enhanced safety THE ISSUE CO 2 emissionsGet price

Development Sf6 Alternative Gases in Switchgears - Switchgear

Nov 23, 2019 · The possible candidates are introduced, which are air, N2, CO2, perfluorocarbon (PFC), hydrofluorocarbon (HFC), gas mixtures containing gaz sf6 as shown in Figure 1 by boiling temperature. These gases do not have higher dielectric strength but lower GWP than sf6 gas, and their boiling points are below 0 ˚C.Get price

Comparison of Partial Discharges in sf6 gas and Fluoronitrile/CO2

Oct 03, 2017 · mixture and SF 6 have almost the same PDIV under 11.6psi, 14.5 psi and 17.4psi. Both slightly lower than 20% mixture. • PD counts in SF 6 are in-between 15% and 20% mixture. • SF 6 has much more PDs with low magnitude and the 20% fluoronitrile/CO 2 mixture has less PDs but with higher magnitude.Get price

SAFETY DATA SHEET - Airgas

SULFUR FLUORIDE,[OC-6-11]-SULFUR HEXAFLUORIDE; ISPAN Sulfr hexafluoride SDS # :001048 Airgas USA, LLC and its affiliates 259 North Radnor-Chester Road Suite 100 Radnor, PA 19087-5283 1-610-687-5253 24-hour telephone :1-866-734-3438 Section 2. Hazards identification Classification of the GASES UNDER PRESSURE - Liquefied gas substance or mixture: Signal wordGet price

(12) United States Patent (10) Patent No.: US 8,791,021 B2

d'Agostino et al. Plasma etching of Si and SiO2 in insulating gas-O2 mixtures J. Appl. Phys. 52 (1) Jan. 1981 pp. 162-167.* Oehrlein et al., Studies of the reactive ion etching of SiGe alloys, J.Get price

Separation of sulfur hexafluoride (gaz sf6) from ternary gas

The separation of sulfur hexafluoride (SF 6), a powerful anthropogenic greenhouse gas, was investigated using membrane technology.Permeation measurements in commercial polysulfone (PSf) hollow fiber membranes were performed using single gases (i.e. N 2, O 2 and SF 6) to investigate the effect of temperature and pressure on separation performance.Get price

Byproducts of Sulfur Hexafluoride (Sulfr hexafluoride) Use in the Electric

Each discharge can result in different mixtures and concentrations of byproducts. Concentrations of SF 6 Byproducts Numerous studies have characterized the byproducts of SF 6. Dervos and Vassiliou (2000) have summarized the most important ones (considering toxicity and risk) and the amounts of each formedGet price

Problems of the application of N2/Sulfr hexafluoride mixtures to gas

Sep 21, 2001 · In designing a gas‐insulated bus (GIB) using N 2 /SF 6 mixtures, there are many application problems, such as the mixture pressure needed in order to maintain the required dielectric and heat transfer performance. Problems of recycling SF 6 are also essential in applying N 2 /SF 6 mixtures.Get price

Sulfur Hexafluoride (sf 6) SicgilSol India Private Limited

gaz sf6 – A Reusable Commodity. sf6 gas is a user-friendly product which besides its many other positive characteristics can be recycled as well. This is increasingly important, particularly today. As an additional service, an analysis can be conducted on your used gaz sf6 gas. Detailed information can be found in the brochure “Analysis of Used gaz sf6”.Get price

Chemistry studies of gaz sf6/CF4, gaz sf6/O2 and CF4/O2 gas phase

The investigations were aimed to understand the chemistry behavior of plasmas generated with SF 6 and CF 4 mixtures or mixed separately with O 2. The neutral mass spectrometry analysis showed a high concentration of gas species namely SF 5 + (parent specie = SF 6 ), SF 3 + (SF 4 ), CF 3 + (CF 4 ) and HF + (HF) in SF 6 /CF 4 plasmas, SF 5 + , SFGet price

Alternatives for insulating gas | 2020 | Siemens Energy Global

Alternatives for insulating gas urgently sought In most of the worldsubstations sulfur hexafluoride (SF 6 ) is the insulating gas of choice. Still, due its potential climate impact, industry is looking for environmentally friendly solutions – and they have options.Get price