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Plasma etching of Si and SiO2 in insulating gas–O2 mixtures: Journal of

Jun 04, 1998 · The products of reaction and etch rates of Si and SiO2 in Sulfr hexafluoride‐O2 plasmas have been studied as a function of feed composition in an alumina tube reactor at 27 mHz, 45 W, and 1 Torr. There is a broad...Get price

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The three parameters that determine the quality — sf 6 concentration, humidity and quantity of decomposition products — can now be measured in one single operation with the new gaz sf6 Multi-Analyser. As a result, service specialists can determine on-site whether the gas still complies with the IEC Standard 60480 or whether it needs purification.Get price

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Journal of Physics: Conference Series OPEN ACCESS Related

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973-sf 6 gas analyzer used for simultaneous measurement of humidity, SF 6 purity and SO 2 concentration. Pure SF 6 is the standard filling within GIS, but over time gas compartments become contaminated with water vapor (H 2 O) through permeation and by desorption from internal materials.Get price

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