Hyang Sook Seong – Cressier FR, Kanton Freiburg, Schweiz

- Set-up a new process using Sulfr hexafluoride O2 gases, achieving increase of the productivity up to 20 % (US patent) -Involved in the development of a simulation program;… -Lead and manage process set-up in Fabrication line 6 / 7, manufacturing 16M / 64 M / 256 M DRAMs, SRAMs; specialized in poly-etching processGet price

(PDF) sf 6 Optimized O2 Plasma Etching of Parylene C

Without the gaz sf6, noticeable nanoforest residuals were found on the O2 plasma etched Parylene C film, which was supposed to arise from the micro-masking effect of the sputtered titanium metal mask.Get price

Solvay Special Chemicals

sf 6 as a process gas in the 16 semiconductor industry Electrical properties Electron affinity 17 Permittivity 17 Dielectric strength 18 Arc-quenching capacity 20 Loss factor 20 Other physical properties Mechanical and caloric data 22 Solubility 23 Specific heat (cp) 23 Vapour pressure 23 Mollier diagram gaz sf6 25 Pressure in the gaz sf6 tank as aGet price

gaz sf6 Transmitter - Draeger

sf 6 Transmitter Product Information, en-master. The Sulfr hexafluoride transmitter is ideally suited for the gas measurement of sulfur hexafluoride in the field of high voltage engineering. The transmitter can be used both as a gas leak detector and to monitor the gas quality in gas-insulated switchgear (GIS) or transformers. DownloadGet price

Decomposition of sf6 gas in an RF Plasma Environment

insulating gas clearly increased from 37.79 to 95.68% because of an increase in power from 5 to 20 W. When the power exceeded 40 W, η sf 6 exceeded 99%. When oxygen was introduced into the reactor (feed O 2 /SF 6 ratio = 2.0), η insulating gas was ~10% less than when no oxygen was added (from 28.61 to 86.09% as the power rose from 5 to 20 W). The addition of oxygenGet price

Gas-phase reactions in plasmas of SF 6 with O 2 : Reactions

The plasma chemistry of Sulfr hexafluoride/O2 mixtures is particularly complicated because of the large number of possible reactions. Over a wide range of conditions, products including SF4, SOF4, SOF2, and SO2F2 can be formed but thre is considerable uncertainty about the major reactions which contribute to the formation of these species. In this work reactions of oxygen atoms with SOF2 and fluorine atomsGet price

On the use of actinometric emission spectroscopy in insulating gas-O2

Abstract. A comparison of the results obtained by solving the Boltzmann equation with the experimental results from optical emissions obtained in SF 6-O 2 radiofrequency discharges, when N 2, Ar, and He are also admitted as actinometers, has allowed us to explore the potentialities and limits of actinometry.Get price

Low temperature etching of Si in high density plasma using Sulfr hexafluoride/O2

Low temperature etching of Si with SF"6 has been studied, using a DECR system and a special Helicon type plasma source. In contrast to the current understanding of low temperature etching, we did not observe a ''freezing'' of the lateral etching reaction, but obtained isotropic etch profiles, even at temperatures below -120^o C. Anisotropic etch profiles are obtained by an addition of O"2.Get price

ROTRONIC - Measurement Solutions International

Rotronic is supporting you globally with around 50 direct sales points.Get price

Plasma etching of refractory metals (W, Mo, Ta) and silicon

The etching rates and reaction products of refractory metals (W, Mo, and Ta) and silicon have been studied in a sf6 gas-O2 r.f. plasma at 0.2 torr. The relative concentrations of WF6 and WOF4and the...Get price

SimulationsofSiandSiO EtchinginSF +O Plasma

SimulationsofSiandSiO2 Etchingininsulating gas+O2 Plasma 481 with SF5 radicals (Eq. (1.3)). At 27% O2, the concen- tration of F atoms approaches the maximum value. At this point, almost all SF5 radicals in Sulfr hexafluoride + O2 plasmaGet price

gaz sf6 gas Companies and Suppliers in Europe | Environmental XPRT

Rapidox - Model 6100 - Pump Back gaz sf6 Gas Analyser. The Rapidox gaz sf6 6100 Pump Back is the latest in fully-automatic gas analysers, designed for controlling and monitoring the quality of Sulfr hexafluoride in medium high voltage gas insulatedGet price

Simon Tschupp – Manager Wafer Process Technology Development

- Process optimization for low pressure Reactive Ion Etching (RIE) of Platinum in Ar/sf 6 and Ar/O2 plasmas - Design, construction, and maintenance of an electrochemical wall-jet flow cell with a tube-in-tube gas… Thesis title: "Model Catalysts Fabricated via Interference Lithography and their Electrochemical Characterization"Get price

Decomposition Characteristics of gaz sf6 under Arc Discharge and

The research on decomposition characteristics of sf 6 and its by-products have great significance to the operation, maintenance, condition assessment and fault diagnosis of power equipment. In this paper, the particle composition models of insulating gas, Sulfr hexafluoride/polytetrafluoroethylene (PTFE), sf6 gas/PTFE/O2, insulating gas/PTFE/H2O, and Sulfr hexafluoride/PTFE/O2/H2O were established by using Gibbs free energy minimization method, andGet price

The sf6 gas-ReUse-Process A contribution on the sustainability of SF

the operating process and are a normal ageing process of the gas. Operating-related contaminants may be eliminated by the operator on-site during maintenance work using service equipment fitted with the corresponding gas treatment systems, as described in Section 3.2.Get price

sf6 gas Gas Properties - sayedsaad.com

insulating gas Gas Properties. Introduction. Sulfr hexafluoride is a combination of sulfur and fluorine its first synthesis was realized in 1900 by French researchers of the Pharmaceutical Faculty of Paris. It was used for the first time as insulating material, In the United States about 1935. In 1953, the Americans discovered its properties for extinguishing theGet price

7 Steps to Set Up an Offshore Company in Switzerland 2019

Switzerland has agreements with more than 100 other states for double taxation avoidance. The tax system in Switzerland is different for every canton, so it is possible to register a canton company that offers the lowest taxation. At the moment, Schwyz and Zug are the most attractive cantons for the offshore company formation in Switzerland.Get price

Offshore Company Registration in Switzerland | Business Setup

2.Faster Implementation of the Process. A professional will be well-versed with the offshore company formation process in Switzerland and can complete the process at a faster rate. They have set a network that will help them to carry out the process within a short duration. 3.Acts as a GuideGet price

PECVD Technology - evatecnet.com

Know-how in etch, evaporation, sputter and PECVD process technologies is at the very heart of our production platforms. Our Advanced Process Control (APC) technologies increase throughput, raise yields and lower cost of ownership. Want to know more? We would be happy to send you updates on our technology.Get price

Hydrogen vehicle - Wikipedia

It can be produced by thermochemical or pyrolitic means using renewable feedstocks, but that is an expensive process. Renewable electricity can however be used to power the conversion of water into hydrogen: Integrated wind-to-hydrogen ( power to gas ) plants, using electrolysis of water , are exploring technologies to deliver costs low enoughGet price

Energies | Free Full-Text | Comparison of the Interrupting

In the study, an interrupting performance test on the 145 kV gas circuit breaker is performed according to three different gases: SF 6, g 3 (5% Novec T M 4710 with 95% CO 2), and CO 2 (70%)/O 2 (30%) gases.Get price

CO2 - carbon dioxide compressor: HAUG Sauer Kompressoren AG

The CO2 is driven in a circulation process. After a recovery at pressure level 8 to 10 bar a compression to 50 till 60 bar takes place. The customer operates various plant sizes. The delivery quantities are in the range of 10 to 200 Nm3/h. HAUG Sauer SolutionGet price

sf6 gas-alternative gases for application in gas-insulated

Mar 20, 2018 · The environmental problems caused by greenhouse gases have received unprecedented attention. Sulfur hexafluoride (SF 6), which is the preferred gas for use in gas-insulated switchgear (circuit breakers, disconnect switches, etc. for high-voltage electrical circuits), has a very high global warming potential, and there is a large international effort to find alternative gases.Get price

Gaseous Dielectrics - 1st Edition - Empowering Knowledge

Purchase Gaseous Dielectrics - 1st Edition. Print Book E-Book. ISBN 9780080346939, 9781483191072Get price

Process Gas Chromatographs | Yokogawa America

Process gas chromatography is used for separating and analyzing chemical compounds in the gas phase of industrial processes. Since the mid-twentieth century, the gas chromatograph has made a name for itself as a do-all analytical instrument with analysis capabilities ranging from percent level to ppm.Get price

sulfur hexafluoride process toshiba – Sulfr hexafluoride Service Cart

Sf6.com Sulfr hexafluoride decomposition components detection is a key technology to evaluate and diagnose the insulation status of insulating gas-insulated equipment online, especially when Geological disposal and High Pressure Sf6 Compressor Methane Compressor (Gow-47/4-150 CE Approval)Get price

Vehicle emissions of greenhouse gases and related tracers

ABSTRACT Measurements of CO2, CO, N2O and CH4 mole fractions, O2 / N2 ratios and the stable isotopes 13C and 18O in CO2 and CO have been performed in air samples from the Islisberg highway tunnel (Switzerland). The molar CO : CO2 ratios, with anGet price

ViennaTS download | SourceForge.net

Apr 26, 2016 · The tool supports several etching and deposition models, essential for the understanding of process-induced phenomena in micro- and nanoelectronics. The model support includes but is not limited to silicon etching in gaz sf6/O2 and HBr/O2 plasmas, silicon dioxide etching in CF4 plasma, anisotropic wet etching of silicon, CFx polymer deposition onGet price

Switzerland Offshore Company Information - CO-Handelszentrum

Switzerland is often regarded as an offshore company location, along with many other offshore jurisdictions. However, unlike other “brass plate” jurisdictions, it has a range of benefits, such as its relatively low tax rates, a reputation for quality and security and its ideal location in the heart of Europe.Get price