Sulfr hexafluoride Sensors | Gas Insulated Switchgear (GIS) | smartGAS

Sulfr hexafluoride gas sensors for every application With the SF 6 sensors of the FLOW EVO series with measuring ranges of 100 Vol.-%, 2000 ppm, 1000 ppm and 50 ppm smartGAS offers technologies for monitoring SF 6 gas quality, SF 6 monitoring of room air and SF 6 leak detection.Get price

An XPS study of photoresist surfaces in Sulfr hexafluoride O2 r.f. plasmas

Jul 01, 1991 · Materials Science and Engineering, A 139 ( 1991 ) 385-393 385 An XPS study of photoresist surfaces in gaz sf6-O2 r.f. plasmas J. F. Coulon and G. Turban Laboratoire des l'lasmas et des Couches Minces, Institut des Mat~riaux de Nantes-Centre National de la Recherche Scientifique, University; de Nantes-UMR 110, 2 nw de la ttoussiniOre, 44072 Nantes Cedex 03 (France) Abstract The behaviour of HPR 206Get price

Low temperature etching of Si in high density plasma using gaz sf6/O2

Feb 01, 1995 · ELSEVIER Microelectronic Engineering 27 (1995) 453-456 MICROELECTRONIC ENGINEERING Low temperature etching of Si in high density plasma using sf6 gas/O2 Johann W. Barthaa, Johann Greschnera, M. Puechb and P. Maquinb aIBM German Manufacturing Technology Center, P.O. Box 266, D-71044 Sindelfingen, Germany bALCATEL CIT, 98, avenue de Brogny-BP, F-74009 Annecy, France Low temperature etching of SiGet price

A Kinetic Model for Plasma Etching Silicon in a sf 6/O2 RF

IEEE Xplore, delivering full text access to the worldhighest quality technical literature in engineering and technology. | IEEE XploreGet price

Processing of inertial sensors using insulating gas-O2 Cryogenic plasma

/ Processing of inertial sensors using sf6 gas-O2 Cryogenic plasma process. SAFE 2003 Semiconductor advances for future electronics. editor / s.n. Utrecht : Stichting voor de Technische Wetenschappen, 2003. pp. 683-686Get price

New gaz sf6 sensors for even more precise gas measurement | smartGAS

Jun 14, 2019 · The two new SF 6 sensors of the FLOW EVO series have been specially designed for analysis, leak detection and ambient air monitoring. They are suitable for insulating gas gas measurement in the 1000 ppm and 2000 ppm ranges and have been significantly improved in terms of detection limits and linearity compared to earlier versions. smartGAS has optimized the NDIR sensors for use in portable SF 6 leakGet price

Plasma etching of Si and SiO2 in sf6 gas–O2 mixtures: Journal of

Jun 04, 1998 · The products of reaction and etch rates of Si and SiO2 in Sulfr hexafluoride‐O2 plasmas have been studied as a function of feed composition in an alumina tube reactor at 27 mHz, 45 W, and 1 Torr. There is a broad...Get price

TD EUROPE Frequently asked Questions (FAQ) and Answers on SF

TD EUROPE . Frequently asked Questions (FAQ) and Answers on SF 6 . About TD Europe. TD Europe is the European Association of the Electricity Transmission DistributionGet price

Two Cryogenic Processes Involving Sulfr hexafluoride, O2, and SiF4 for

sf 6 or gaz sf6/O2 plasmas are used as etch cycles and SiF4/O2 plasmas are used as passivation cycles. Trenches with a critical dimension of 0.8 µm have been etched to a depth of 38 µm with anGet price

SimulationsofSiandSiO EtchinginSF +O Plasma

SimulationsofSiandSiO2 EtchinginSulfr hexafluoride+O2 Plasma 481 with SF5 radicals (Eq. (1.3)). At 27% O2, the concen- tration of F atoms approaches the maximum value. At this point, almost all SF5 radicals in sf 6 + O2 plasmaGet price

VALIDATION METHODS OF sf 6 ALTERNATIVE GAS

Schneider-Electric - France Schneider-Electric - France Schneider-Electric - France [email protected] [email protected] [email protected] ABSTRACT This paper deals with the validation steps of alternative gases to sf 6 for medium voltage switchgear applications.Get price

Passivation mechanisms in cryogenic gaz sf6/O2 etching process

Oct 15, 2003 · Passivation mechanisms of Si trenches involved in SF 6 /O 2 cryogenic plasma etching were investigated in order to better control the process and avoid defects. Trench sidewalls and profiles were ex situ characterized geometrically by SEM and chemically by spatially resolved XPS experiments.Get price

Did anyone have experience in etching SiO2 with Sulfr hexafluoride in ICP

The gasese we have are: sf6 gas(0-100sccm), O2(0-20sccm), Ar(0-5sccm), and C4F8. my sample is 3um SiO2 deposited on the surface of Si wafer. The recipe I designed for 3um SiO2 etching is:Get price

High-aspect-ratio deep Si etching in insulating gas/O2 plasma. II

Jul 28, 2010 · In this article, the authors focus on the profiles formed by high-aspect-ratio deep Si etching with gaz sf6/O2 plasma mixtures. One of the most serious problems for deep Si etching processes is lateral...Get price

sf6 gas Transmitter - Draeger

gaz sf6 Transmitter Product Information, en-master. The gaz sf6 transmitter is ideally suited for the gas measurement of sulfur hexafluoride in the field of high voltage engineering. The transmitter can be used both as a gas leak detector and to monitor the gas quality in gas-insulated switchgear (GIS) or transformers. DownloadGet price

Journal of Physics: Conference Series OPEN ACCESS Related

micromachining of silicon using an Sulfr hexafluoride/O2 inductively coupled plasma F Jiang, A Keating, M Martyniuk et al.-Low-pressure nonequilibrium plasma for a top-down nanoprocess Toshiaki Makabe and Takashi Yagisawa-Recent citations Electron collision cross sections of CHF 3 and electron transport in CHF 3 and CHF 3 Ar mixtures Satoru Kawaguchi et al-Get price

Surface mechanisms in O2 and sf 6 microwave plasma etching of

Photoresist etching mechanisms in O 2 abd SF 6 microwave plasmas are investigated using x‐ray photoelectron spectroscopy (XPS) and etch rate measurements. Experiments are performed in a microwave multipolar plasma using an electron cyclotron resonance at 2.45 GHz and independent rf biasing at 13.56 MHz.Get price

Etching and Surface Modification of Polyimide in O2 -insulating gas

Etch rates of Kapton H polyimide film in SF 6 - O 2 plasmas (0.25 torr) were studied as a function of the input gas mixture, the excitation frequency (25 kHz -450 kHz; 13.56 MHz) and the biasing mode.The treated surface was examined by X P S, SEM and contact angle measurement.Get price

Decomposition of sf6 gas in an RF Plasma Environment

sf 6 clearly increased from 37.79 to 95.68% because of an increase in power from 5 to 20 W. When the power exceeded 40 W, η insulating gas exceeded 99%. When oxygen was introduced into the reactor (feed O 2 /SF 6 ratio = 2.0), η gaz sf6 was ~10% less than when no oxygen was added (from 28.61 to 86.09% as the power rose from 5 to 20 W). The addition of oxygenGet price

sf 6 service carts – Synergy Power Systems

The L030 maintenance device is equipped with a compact but high capacity compressor which enables sf 6 reclaiming up to < 5 mbar – a value outperforming current IEC regulations by far. A smart device for “smart grids”. Other features: Device for liquid storage of Sulfr hexafluoride gas; Sulfr hexafluoride gas recovery down to < 5 mbarGet price

smartgas Calibration for extra high Voltages

smartGAS Mikrosensorik | smartGAS. ANAREX from smartGAS is a family of highly accurate, ready-to-install multi-gas analysers. They are supplied as a ready-to-connect plug-and-play solution and impress with their stable measurement performance, easy and intuitive operation via touchscreen and simple sensor calibration.AMA Seminar Gas Measurement Technology Ii Trade Fairs C2h4 SensorsGet price

sf6 gas properties, and use in MV and HV switchgear

France and elsewhere during the previous 25 years. c 1971: changes in the needs of the industry led Merlin Gerin to launch the Fluarc SF 6 MV circuit-breaker. c More recently, SF 6 has been adopted for use in MV switches, ring main units, contactors and circuit-breakers, GIS, covering all the needs of the elecrical distribution industry.Get price

Concurrent effects of wafer temperature and oxygen fraction

The concurrent influences of wafer temperature, gas mixture, and substrate bias on the cryogenic etch rates of Si with Sulfr hexafluoride/O2 inductively coupled plasmas are experimentally and computationally invest...Get price

China Infrared Sensor Sf6 with O2 Leak Alarm - China Infrared

gaz sf6 Infrared Gas Sensor IR Module FAD G series infrared Sulfr hexafluoride gas sensors uses non-dispersive infrared (NDIR) detection technology, with advantages of long life, low cost, intelligence, micro etc. Sensor is easy to use, with a complete gas detection, serial communication function, widely used in ventilation systems, industrial control, environmental monitoring and other industries.Get price

Application of fluoronitrile-based alternative gas to insulating gas to

It is a strategic goal for RTE to significantly lower the CO2 footprint of its assets in the future and therefore to reduce the use of sf6 gas. In collaboration with GE Grid Solutions, RTE installed the first 63 kV GIS switchgear which runs with an environmentally friendly gas mixture based on C4F7N, CO2 and O2 named g3, at the Grimaud substation in the gulf of Saint-Tropez, south of France.Get price

Tracking Down the Greenhouse Gas Sulfr hexafluoride with Infrared Thermography

gaz sf6 Gas Detection 0.4 0.7 1 µm 2 µm 5 µm 10 µm 13 µm SW MW LW The Electromagnetic Spectrum Infrared energy is part of the electromagnetic spectrum and behaves similarly to visible light.Get price

Plasma Etching of Silicon Carbide - Materials Research Forum

Plasma Etching of Silicon Carbide K. Zekentes, J. Pezoldt, V. Veliadis Plasma etching is the only microelectronics-industry-compatible way to etch SiC for the device pattern transfer process. After more than twenty years of SiC plasma etching technology development, there are still issues such as (i) the etch-rate dependence on plasma parameters, (ii) the surface roughness, […]Get price

sf6 gas control of emissions tai`an taishan – sf6 gas Service Cart

RF051 Economy Series gaz sf6 Gas Handling Cart; RF391 Mega Series insulating gas Gas Recycling Unit; S100 Micro Series gaz sf6 Gas Recycling Device; RFJ Sulfr hexafluoride Refilling Evacuating Devices; RF912 sf6 gas Gas Analyzer; NA1013 sf6 gas Gas Monitoring System; RSSSulfr hexafluoride Smart gaz sf6 Sensor; RF300N insulating gas Service Cart; sf 6 Gas Purification for re-use System; Our Client; Connect usGet price

Hydrogen vehicle - Wikipedia

In 2017, Pragma Industries of France developed a bicycle that was able to travel 100 km on a single hydrogen cylinder. In 2019, Pragma announced that the product, "Alpha Bike", has been improved to offer an electrically-assisted pedalling range of 150 km, and the first 200 of the bikes are to be provided to journalists covering the 45th G7Get price