Precision plasma etching of Si, Ge, and Ge:P by sf 6 with added O2

Mar 31, 2014 · The impact of the O 2 content in SF 6 -O 2 gas mixtures on the etch rate and sidewall profile of silicon (Si), germanium (Ge), and phosphorous doped germanium (Ge:P) in reactive ion etching has been studied. The characteristics of etch rate and sidewall profile are greatly affected by the O 2 content.Get price

Precision plasma etching of Si, Ge, and Ge:P by Sulfr hexafluoride with added O2

Precision plasma etching of Si, Ge, and Ge:P by Sulfr hexafluoride with added O2 Wongwanitwattana, Chalermwat Vacuum Surfaces and Films. Pub Date: May 2014 DOI:Get price

Silicon Nanostructuring Using gaz sf6/O2 Downstram Plasma Etching

12 Wongwanitwattana C, Shah VA, Myronov M, Parker EHC, Whall T, Leadley DR. Precision plasma etching of Si, Ge, and Ge:P by Sulfr hexafluoride with added O2. Journal of Vacuum Science Technology A. 2014;32(3):031302. [ Links ]Get price

Precision plasma etching of Si, Ge, and Ge:P by Sulfr hexafluoride with

The impact of the O2 content in gaz sf6-O2 gas mixtures on the etch rate and sidewall profile of silicon (Si), germanium (Ge), and phosphorous doped germanium (Ge:P) in reactive ion etching has been studied. The characteristics of etch rate and sidewall profile are greatly affected by the O2 content.Get price

Next Stop, Kyiv: Ukrainian Railways' $1 Billion Deal With GE

After this deal, GE Transportation’s first in the country, Ukraine may eventually grow to become one of the unit’s key international customers, similar to Kazakhstan, where GE has executed over $3 billion of contracts with the national railroad since the early 2000s, according to Bayhan. “This is a good start,” he says.Get price

Gas Insulated Medium Voltage Switchgear - ABB

2) and vacuum breakers, a fundamental choice made by GE to assist in reducing the greenhouse effect. SF 6 (sulphur-hexafluoride ) is on the list of greenhouse gasses in the Kyoto Protocol, with a Global Warming Potential ( GWP ) of 23,000. Many other medium voltage switchgear systems use SF 6 gas as the only insulating medium. Leakage of SFGet price

GEA Ukraine | Contact Information

GEA is one of the world’s largest systems suppliers for the food, beverage and pharmaceutical sectors. The international industrial technology group specializes in machinery and plants as well as advanced process technology, components and comprehensive services.Get price

First GE Transportation Evolution Series Locomotive Enters

Dec 14, 2018 · GE Transportation and its customer, Ukrainian Railways, have announced that the first Evolution Series locomotive has started operating in Ukraine. This is a major milestone for both companies and part of a project to upgrade the countryexisting diesel-electric fleet.Get price

Comparison Between Vacuum and Sulfr hexafluoride Circuit Breaker

Aug 29, 2018 · The most important characteristics of the insulating gas gas and vacuum-circuit breakers, i.e., of sf 6 gas and vacuum as arc-extinguishing media are summarized in Table-1. In the case of the sf 6 circuit-breaker, interrupters which have reached the limiting number of operations can be overhauled and restored to ‘as new’ condition.Get price

Switchgear | ABB

We help plant operators understand how digital switchgear can help overcome the hidden costs of traditional switchgear by improving your ability to collect, access, analyze and take action on the data your equipment and infrastructure creates, helping you achieve cost savings of up to 30 percent.Get price

Sulfr hexafluoride Free HV GIS and Breakers

Why sf 6 Free GIS and breakers? Because alternatives are available 6 ABB, GE, Hitachi and Siemens have alternatives to sf6 gas Year non-Sulfr hexafluoride Live Tank Breakers will be available Year non-gaz sf6 Dead Tank Breakers will be available Year non-Sulfr hexafluoride GIS Will be available 70kV Available 2015 Available 2016 Available 2016 115kV Available 2017 Available 2017Get price

Byproducts of Sulfur Hexafluoride (sf 6) Use in the Electric

Byproducts of Sulfur Hexafluoride (SF 6) Use in the Electric Power Industry Prepared for U.S. Environmental Protection Agency Office of Air and RadiationGet price

EU Report Highlights Sulphur Hexafluoride Countdown

In HV, a 170kV gas insulated switchgear (GIS) based Novec 5110 mixture with CO2 and O2 was the first sf6 gas alternative installed in a HV GIS, located in Zurich in 2015.Get price

List of equipment of the Ukrainian Ground Forces - Wikipedia

Ukraine begun 2014 with 83 BMs' and 700 BVs', but since the beginning of the War in Donbass, at least 170 T-64 variants were destroyed in combat and 65 captured by opposing forces. In 2019 UkrOboronProm announced the Kharkiv Armored Plant was modernising T-64BV tanks to the 2017 Model and that over 100 had been delivered to the Ground Forces byGet price

Did anyone have experience in etching SiO2 with Sulfr hexafluoride in ICP

The gasese we have are: sf 6(0-100sccm), O2(0-20sccm), Ar(0-5sccm), and C4F8. my sample is 3um SiO2 deposited on the surface of Si wafer. The recipe I designed for 3um SiO2 etching is:Get price

National Grid begins journey to Sulfr hexafluoride-free HV substations

GE reserves the right to make changes to specifications of products described at any time without notice and without obligation to notify any person of such changes. Grid-GIS-L5-Sellindge_GIL_g3-1597-2017_08-EN.Get price

GE - SecoGear - SecoVac - Metal Clad Switchgear - Embedded

GE pioneered experimental vacuum interrupters in the 1920's, refi ned it and introduced the worldfi rst 15kV vacuum circuit breaker in the 1960's. To date, this interrupter design has been the world leader in vacuum technology and has accumulated over 45 years of reliable fi eld service. World Class QualityGet price

GCB | Systems | Siemens Global

Replace your aging GCB by a sf 6- and maintenance-free vacuum technology generator breaker switchgear! Integrated GCB solutions for pumped storage application Non-segregated and isolated phase designs for nominal current up to 12,700 A and short circuit ratings up to 110 kAGet price

Outdoor Sulfr hexafluoride Vacuum Circuit Breaker Suppliers in China

Outdoor Sulfr hexafluoride Vacuum Circuit Breaker. VW20 series outdoor sf6 vacuum circuit breaker adopts explosion-proof and insulation structure uses vacuum arc extinguishing and sf 6 gas as the insulating medium and widely applicated in 11KV and 33KV medium voltage electric power system.Get price

Development Sf6 Alternative Gases in Switchgears - Switchgear

Nov 23, 2019 · Sf6 gas is widely used in electric power transmission and distribution systems, as for example in gas insulated switchgear (GIS), circuit breakers (CB) and load break switches. It combines unique electrical insulation and arc interruption capability. However, it is also a very strong greenhouse gas with a global warming potential (GWP) of about 23500 over …Get price

Dry Etch at UCSB - NNIN

MHA Etching-InP – Parallel Plate Above: InP Etching. CH 4/H 2/Ar 4/20/10sccm, 75 mTorr, 450V, 43nm/min, SiN mask. O 2 clean for 5 min at 300V at end to remove polymers from sampleGet price

NNCI Site Tool Type Gases Application Wafer size sf6 gas, C4F8

Deep silicon etch: 100mm Versaline ICP; Deep Ge etch DSEIII SOI; Cornell Unaxis 770 ICP; insulating gas, C4F8, O2, Ar Deep silicon etch; 100mm Mixed silicon etch 150mmGet price

gaz sf6 Gas Insulated Switchgear(GIS) Manufacturers and Suppliers

insulating gas gas pressure for the insulating use is preserved below 2.5 bars while insulating gas gas pressure for interrupting purpose is ranged from five to seven bar. Also, as vacuum technology isn’t accessible for high voltage, so for C-GIS system above 72.5 KV, only gaz sf6 is utilized both for insulation and interruption medium.Get price

Comparison of etching processes of silicon and germanium in

Reactive ion etching of Si and Ge in sf6 gas–O2 is investigated. Etch rate shows that Si etching is selective with respect to Ge in sf 6–O2 (O2<50%); the reverse is observed in gaz sf6–O2 (O2≳50%).Get price

Sf6 Gas Processing Equipments - Vacuum Plant Instruments

Successful implementation of Software bases FEA analysis. An ISO 9001:2008 certified company, with a brilliant track record of 50 Years. In depth know how for the successful designing implementation of turn-key engineering solutions specifically for heavy electrical industry.Get price

GE Global Research Electronics Sensing

Bake ovens Variety of vacuum and nitrogen bake ovens up to 400˚C Anodization Wafer level anodization for the creation of metal oxide films Todd Miller , Commercial Leader | [email protected] | www.geglobalresearch.comGet price

Gas insulated switchgear - Switchgear | ABB

How Sulfr hexafluoride-free technology supports a more sustainable future for utilities Trade press release ABB presents world’s first switchgear that allows customers to switch to a green insulation gas at any pointGet price

Switchgear Type 8DJH for Secondary Distribution Systems up to

Application ypical T uses 2 Switchgear Type 8DJH for Secondary Distribution Systems up to 24 kV, Gas-Insulated · Siemens HA 40.2 · 2017 R-HA40-111.tif R-HA40-112.tif R_HA40-150a tifGet price

Relevance of sf6 gas in Switchgear and its Contribution to

These Sulfr hexafluoride alternative solutions include vacuum technology and solid insulated Switchgear designs. Their sf6 gas free product range includes MMS, SVS, and Xiria to name a few. In addition to this, Eaton along with Coteq, USG Industrial Utilities, Driescher, and Nuventura are part of the Green Switching Initiative that promotes and champions the useGet price