sf6 gas By-products: Safety, Cleaning, and Disposal Concerns

6 Decomposition and Contamination • Reactive decomposition byproducts form when SF 6 is exposed to: 1. spark discharges, 2. partial discharges, 3. switching arcs, and 4. failure arcing • Decomposition byproducts can take the form of gas or powders • Other types of contaminants can include moisture and air (from handling or leakage),Get price

Decomposition of Sulfr hexafluoride in an RF Plasma Environment

sf6 gas was not affected by the feed O 2 /SF 6 ratio, lead-ing to more than 99% decomposition. Reaction Products The major reaction products of the decomposition of SF 6 were SiF 4, SO 2, F 2, SO 2 F 2, SOF 2, and SOF 4. The applied power was the most important factor that limited the production of all species.13 The mole fraction of SiF 4 in-Get price

Sulfr hexafluoride Pyrolysis Decomposition in N2 or O2 Bath Gas and the

sf6 gas decomposition was found to be a first-order reaction in N2, O2 and Ar+H2O bath gas. Apparent activation energies of gaz sf6 decomposition were 386 and 446 kJ· mol-1 for N2 and O2 bath gasGet price

The decomposition products of sulfur hexafluoride (Sulfr hexafluoride

Nov 01, 2007 · The toxic products containing fluorine and/or sulfur in the SF 6 decomposition may include S 2 OF 10, CF 4, COF 2, F 2, HF, H 2 S, NF 3, F 2 O, SiF 4, SO 2, S 2 F 10, SF 4, SO 2 F 2, SOF 2, SOF 4 and S 2 O 2 F 10, , , , , , , , , . 3.1. Chemical and physical information on SF 6 decomposition toxic productsGet price

The decomposition products of sulfur hexafluoride (sf6 gas

From the environmental and health points of view, it is necessary to mitigate and control the emissions of the decomposition products from SF 6 destruction processes because most of them (e.g. S 2 F 10, SF 4 and HF) are highly reactive, corrosive and toxic, and few of them are also potent GHGs. This article aimed to introduce the fullyGet price

The impact of decomposition products in SF 6 on the

decomposition products resulting from partial discharges [6]. The following study presents a report on the results of tests in which SF 6-decomposition products are produced through partial discharges, and interactions with electrically stressed epoxy resin surfaces are enabled. 1. Experimental set-up and realisationGet price


DECOMPOSITION OF Sulfr hexafluoride-Yicheng Wang,t R. L. Champion,+ I. V. Dyakov,+ and B. L. Peko+* 1. INTRODUCTION Sulfur hexafluoride (gaz sf6) is widely used as a gaseous dielectric in high-voltage applications due to its extremely large cross section for electron attachment [1-3] and theGet price

Decomposition Characteristics of sf6 gas and Partial Discharge

The decomposition characteristics of gaz sf6 under four types of negative DC partial discharge (DC-PD) are obtained. The relationship between the decomposition characteristics of gaz sf6 and the PD types was further studied. Moreover, back propagation (BP) neural network algorithm [29–38] is used to recognize the PD types.Get price

(PDF) Decomposition of SF 6 in an RF Plasma Environment

The decomposition fraction of gaz sf6 [etasf6 gas (C(in)-C(out))/C(in) x 100%] and the mole fraction profile of the products were investigated as functions of input power and feed O2/gaz sf6 ratio in an SiO2Get price

insulating gas Worries – The Most Potent and Persistent Greenhouse Gas

Sep 20, 2019 · It likely forms via an electrically induced decomposition reaction of SF 6: 2 SF 6(g) → S 2 F 10(g) + F 2(g) S 2 F 10 has a toxicity four times that of phosgene, COCl 2! In WWII, gaseous S 2 F 10 was considered a chemical warfare pulmonary agent. Its toxicity emanates from the disproportionation reaction: S 2 F 10(g) → SF 6(g) + SF 4(g)Get price

Plasma etching of Si and SiO2 in Sulfr hexafluoride–O2 mixtures: Journal of

Jun 04, 1998 · The products of reaction and etch rates of Si and SiO2 in Sulfr hexafluoride‐O2 plasmas have been studied as a function of feed composition in an alumina tube reactor at 27 mHz, 45 W, and 1 Torr. There is a broad...Get price

Byproducts of Sulfur Hexafluoride (sf6 gas) Use in the Electric

the decomposition products and concentrations formed under actual conditions can vary depending on the equipment used and the type of electrical discharge (CIGRE 1997). 1 CIGRE (the International Council on Large Electric Systems) is a permanent non-governmental and non­ profit-making international association based in France.Get price

Theoretical study of the decomposition mechanism of insulating gas/Cu

Sep 10, 2018 · The compositions of SF 6 arc plasma are contaminated by Cu vapor through electrode erosion and thus affect the performance of the high-voltage SF 6 circuit breaker. But the essential data for chemical kinetic models to study the non-equilibrium compositions of SF 6 /Cu mixtures, namely the decomposition mechanism of SF 6 /Cu mixtures, is still not clear.Get price

sf6 gas Decomposition in Gas-Insulated Equipment - IEEE Journals

Abstract: The increasing application of sf6 gas as an insulating gas has led to many studies on insulating gas decomposition in gas-insulated equipment. In the presence-of an electric arc, spark or corona, Sulfr hexafluoride decomposes to a wide variety of chemically active products which possess completely different properties from sf 6.Get price

Decomposing Mechanism of Sulfr hexafluoride under Positive DC Partial

The influence of H2O on gaz sf6 decomposition characteristics under positive DC partial discharge (PD) is significant. To evaluate PD fault severity in DC Sulfr hexafluoride-insulated equipment using the production characteristics of gaz sf6 decomposition components, the corresponding relationship and mathematical expression between the production of insulating gas decomposition components and the H2O content should beGet price


35A2 at higher energies. The decomposition cross sections of sf6 gas- in collisions with N2 are similar to those observed for rare gas targets. The target-independent features of gaz sf6-decomposition can be qualitatively explained using a two-step model in which collisional decomposition is followed by unimolecular decomposition. 955 8 7-1 a Ar 0/ a 6Get price

Decomposition Characteristics of sf 6 under Flashover

In this paper, the flashover discharging experiment was carried out on epoxy resin surface in an sf6 gas atmosphere under pin-plate electrodes, with the electrodes distance from 5 mm to 9 mm. The concentration of seven characteristic gases was detected, indicating that the concentration of SOF2 and CF4 was the two highest, followed by SO2, CO2, SO2F2, CS2, and H2S. Based on the changes in theGet price

Decomposition of Sulfr hexafluoride and H2S Mixture in Radio Frequency

May 28, 2003 · Sulfur hexafluoride (insulating gas) is a gaseous pollutant generated in manufacturing processes in the semiconductor industry. Hydrogen sulfide (H2S), as a reductant, was used to treat sf 6 in a radio frequency (RF) plasma system. In the sf 6/Ar plasma system, SiF4 and SO2 were the two dominant species detected in the glass reactor; other detected species were SO2F2, SOF2, and SOF4. In the Sulfr hexafluoride/H2S/ArGet price

sf6 gas Gas Properties - sayedsaad.com

sf 6 Gas Properties. Introduction. Sulfr hexafluoride is a combination of sulfur and fluorine its first synthesis was realized in 1900 by French researchers of the Pharmaceutical Faculty of Paris. It was used for the first time as insulating material, In the United States about 1935. In 1953, the Americans discovered its properties for extinguishing theGet price

Experimental study on the relationship between partial

insulating gas decomposition serves as an effective means for online fault detection and diagnosis of sf 6 insulated equipments. The relationship between Sulfr hexafluoride decomposition products and partial discharge (PD) in insulating gas insulated equipments remains a significant theoretical and practical issue to be addressed. Based on the simulations of protrusion discharge, floating discharge and surface discharge in Sulfr hexafluorideGet price

Calculated rate constants of the chemical reactions involving

Mar 11, 2016 · Casanovas A M, Diaz J and Casanovas J 2002 Spark decomposition of sf6 gas, Sulfr hexafluoride/N2 (10: 90 and 5: 95) mixtures in the presence of solid additives (polyethylene, polypropylene or Teflon), gaseous additives (methane, ethylene, octofluoropropane, carbon monoxide or dioxide), water or oxygen J. Phys. D: Appl. Phys. 35 2558–69Get price

The Sulfr hexafluoride Decomposition Mechanism: Background and Significance

Jan 24, 2017 · Gas Insulated Switchgear (GIS) has been widely used in substations. The insulating medium used in GIS is sulfur hexafluoride (insulating gas) gas. However, the internal insulation defect existed in GIS would inevitably lead to partial discharge (PD), and cause the composition of gaz sf6 to SOF2, SO2F2 and SO2 and other characteristic component gases. The decomposition phenomenon would greatly reduce theGet price

End of life services for medium voltage equipment - Service

Plant and equipment disposal, PCB (Polychlorinated Biphenyls) disposal, pollution prevention / control, waste minimization, gaz sf6 gas decommissioning and disposal. ABB´s service technicians are continuously trained and certified to handle Sulfr hexafluoride and follow correct gas handling procedures.Get price

Decomposition of insulating gas in an RF plasma environment.

The decomposition fraction of insulating gas [etagaz sf6 (C(in)-C(out))/C(in) x 100%] and the mole fraction profile of the products were investigated as functions of input power and feed O2/Sulfr hexafluoride ratio in an SiO2 reactor. The species detected in both Sulfr hexafluoride/Ar and sf6 gas/O2/ Ar RF plasmas were SiF4, SO2, Fe2, SO2F2, SOF2, SOF4, S2F10, S2OF10, S2O2F10, and SF4.Get price

Quan-Zhi Zhang - Associate Professor - Dalian University of

Recently, one such novel process with limited plasma damage is cryogenic etching of low-k material with Sulfr hexafluoride/O2/SiF4 and CxFy plasmas. In my work, the fundamental mechanisms of the plasma, and its interaction with the surface, for these gas mixtures, will be studied to improve cryogenic plasma etching.Get price

Thermal Decomposition Properties of Epoxy Resin in insulating gas - MDPI

As a promising alternative for pure gaz sf6, the mixture of Sulfr hexafluoride/N2 appears to be more economic and environment-friendly on the premise of maintaining similar dielectric properties with pure Sulfr hexafluoride. But less attention has been paid to the thermal properties of an insulating gas/N2 mixture, especially with insulation materials overheating happening simultaneously. In this paper, thermal decomposition propertiesGet price

Sodium hexafluorosilicate | Na2SiF6 - PubChem

When heated to decomposition it emits toxic fumes of /hydrogen fluoride/ and Na2O. Lewis, R.J. SaxDangerous Properties of Industrial Materials. 9th ed. Volumes 1-3. New York, NY: Van Nostrand Reinhold, 1996., p. 1424Get price

Study of the roughness in a photoresist masked, isotropic

Study of the Roughness in a Photoresist Masked, Isotropic, SF 6-Based ICP Silicon Etch Kristian P. Larsen,a Dirch Hjorth Petersen,a and Ole Hansena,b,z aMIC - Department of Micro and Nanotechnology, NanoDTU, and bDanish National ResearchGet price

Collisional Decomposition of sf 6 | NIST

Sep 01, 2000 · Abstract Insulating gas mixtures containing SF 6 have been promoted to serve as replacements for pure SF 6 in order to reduce SF 6 atmospheric emission. It has been argued that some synergism may be achieved by choosing proper buffer gases in mixtures with SF 6 such that the buffer gases efficiently slow down electrons into an energy range where the electron attachment cross section for SF 6Get price