sf 6-Gas Liquefaction System | WOOSUNG VACUUM TECH - Komachine

Sulfr hexafluoride gas purification, Liquefaction reclaimer, Helium leakage test, Oil filter, Oil purifier, Vacuum pump, Gauge, Dryer, Chamber Inquiry Call +82-51-311-5525 Mail Mail Copied! Copied!Get price

Companies - Vacuum pumps - South Korea | Kompass Business

Activity and products #Keyword Oil Rotary Vane Vaccum pump #Company Introduction dooVAC, founded in 1990, is a first generation of localizing vacuum pumps with 30 years experience and know-hows and is one of the promising small-medicum business in South Korea.Get price

WoooSung Vacuum - Korea Vacuum pump manufacturer

Woosung Vacuum Company is a professional manufacturer of vacuum pumps. The company started manufacturing of the products related with vacuum in 1976. Since that time, we have made every effort to manufacture the single item of the best quality vacuum product and contributed ourselves to the improvement of the quality of the products.Get price

WOOSUNG VACUUM TECH - Komachine

WooSung Vacuum Technology Co., Ltd will make a contribution to humans as a specialized vacuum industry is a big flow of transition. WooSung Vacuum Technology Co., Ltd, has been devoting themselves to develop and improve Korean Vacuum Industry as a true leader with our continuous challenges and revolutionalry mind, even in the process of numerous enlargements of our factory from a small officeGet price

insulating gas Gas Handling System - Kaji Tech

4 sf 6 Gas Handling System Model: KL50V-5.5OL-PⅢ Features: · An original oil-less compressor and oil-free vacuum pump for withdrawal are built-in. · Portable, compact light weight, and liquid Sulfr hexafluoride storage type Sulfr hexafluoride gas handling system.Get price

Vacuum pumps in plasma technology

Special vacuum pumps have been developed to work with corrosive gases (CF4 / O2, insulating gas, …). The rotary slide vane pumps described below are suitable for many applications. However, using these pumps often with corrosive gases reduces their useful life .Get price

rotary vacuum pump korea, rotary vacuum pump korea Suppliers

Korea hot sale 220v/60hz high volume 8 cfm 3/4 hp air conditioning vacuum pump and 5 gal vacuum degassing chamber Wenling Hongbaoshi Vacuum Equipment Factory US $40.0-100.0 / Piece 1 Piece (Min. Order)Get price

FV0016 Sulfr hexafluoride Gas Filling and Air Evacuation - 16m3/h

A vacuum pump with a capacity of 16 m³/h is used for emptying air out of objects, down to a final vacuum . 1 mbar.Sulfr hexafluoride filling Sulfr hexafluoride hose is connected to objects via enclosed connections DN8/DN20. Filling is done with self-pressure from gas tube. The desired final pressure is adjusted with the sf6 gas gas regulator mounted at the top of the gas trolley.Get price

Pump Vacuum Unit for Sf6 Gas Equipment - sf 6 Expert

A vacuum pump combined with a Roots pump enables to obtain a final vacuum of 2x 10-2 mbar. sf 6 Gas Servicing Equipment – ENERVAC Get Price! gaz sf6 Gas Servicing Equipment Sulfur Hexafluoride (Sulfr hexafluoride) is an excellent gaseous dielectric for high voltage power applications.Get price

Handling and Use of Sulfur Hexafluoride Gas

11. Evacuate equipment using processing cart vacuum pump. 12. Break vacuum using SF 6 gas. 13. Fill equipment in accordance with section A. E. Removal of Hazardous Solid By-Products 1. After the SF 6 gas has been removed from the gas compartment and prior to opening the gas compartmentporthole(s), put on the following approved protectiveGet price

Decomposition of Sulfr hexafluoride in an RF Plasma Environment

gaz sf6 clearly increased from 37.79 to 95.68% because of an increase in power from 5 to 20 W. When the power exceeded 40 W, η Sulfr hexafluoride exceeded 99%. When oxygen was introduced into the reactor (feed O 2 /SF 6 ratio = 2.0), η Sulfr hexafluoride was ~10% less than when no oxygen was added (from 28.61 to 86.09% as the power rose from 5 to 20 W). The addition of oxygenGet price

sf6 gas Gas Decomposed! Best handling practices APC

• Pump up sprayer(s) with Baking soda and distilled water mix • HEPA Vacuum with non metallic attachments • sf 6 Cylinder(s) empty (Under Vacuum) • Sulfr hexafluoride Recovery and Testing Equipment • Denatured alcohol • Atmosphere/air monitor . 5Get price

Korea vacuum pump manufacturers

products: vacuum systems, dry vacuum pumps KDP (Fixed Pitch Dry Screw Vacuum Pumps) and SDV (Variable Pitch Dry Screw Vacuum Pump) KOWEL Precision Co., Ltd. head /factory - - Noksan industrial complex 23B 3L, 1583-1, Songjung-Dong Kangseo-Ku, Busan, 618-270, KoreaGet price

South Korea - VACUUBRAND, INC.

Sales contact in Germany Distributors; VACUUBRAND GMBH + CO KG Carsten Ruth Alfred-Zippe-Str. 4 97877 Wertheim Germany Tel.: +49 9342 808-5554 E-mail: carsten.ruth vacuubrand.comGet price

Sf6 Gas Processing Equipments - Vacuum Plant Instruments

Hexa-M Series is compact, simple to operate a suitable solution for efficient handling of insulating gas gas in gaz sf6 switchgear. Available Capacities: Compressor : 100% Oil-less Piston Displacement : 6 / 15 m3/h. Discharge Pressure : 25 / 50 Bar . Vacuum Pump : 40 / 60 / 100 m 3 /h. Ultimate Vacuum : ≤ 1 mbar (abs)Get price

Mobile Sulfr hexafluoride Gas Vacuum Pumps Distributors in KSA | CEPCO Sales

Mobile Sulfr hexafluoride gas vacuum pumps are used for the evacuation of air or nitrogen off gas compartments. We offer mobile insulating gas gas vacuum pumps in Saudi Arabia in a variety of sizes and functions that are easily accessible to the user.Get price

Mark Morgan - NNCI

•High vacuum pump: Alcatel 1600M •Load lock roughing pump: Edwards XDS 35 •Chamber roughing pump: Ebara A10S •Process gases: –insulating gas (100 sccm), O2 (100 sccm), C4F8 (100 sccm), Ar (100 sccm) •100 mm (150 mm) wafers and mounted chips •Quartz clamp ring, He backing •Chuck: LN2 cooled, but typically at 15 CGet price

QV2 Vacuum Pump for low temperature and voltage - Bacharach, Inc.

The QV2 vacuum two stage rotary vane pump from Bacharach is feature-rich. Rated for up to 1.7 CFM, the pump pulls 25 microns vacuum and include 1/4, 3/8 and 1/2 in. fittings. The QV2 is specially designed to operate under low temperature and low voltage conditions to guarantee normal starting in winter and rated voltages ± 10%.Get price

2013-05-21 NNIN EtchWorkshop rev2

May 21, 2013 · • High vacuum pump: Alcatel 1600M • Load lock roughing pump: Edwards XDS 35 • Chamber roughing pump: Ebara A10S • Process gases: – sf 6 (100 sccm), O2 (100 sccm), C4F8 (100 sccm), Ar (100 sccm) • 100 mm (150 mm) wafers and mounted chips • Quartz clamp ring, He backingGet price

Mathies:RIE - OpenWetWare

9. You may switch to Sulfr hexafluoride (channel 2) now. No need to purge. The process is the same as O2 plasma. But both Sulfr hexafluoride and He should be turned on on the PD module. And open the GAS #1 switch on the PE module. All gases come in from the same line. 10. To vent the system. Turn off the vacuum pump by switching the SOLN toggle to the closed position.Get price

SPTS LPX PEGASUS DRIE, Refurbished | For Sale from GCE Market

Digital Fast acting MFCs: gaz sf6, C4F8, O2 (standard) Matching speed: < 1 second Source power: 13.56MHz 3kW Vacuum: Digitally controlled Magnetically levitated Turbo pump Pendulum valve with integrated controller for process chamber pressure control and shut off Dry pump for turbo pump forline pumping Pendulum Temp control: +20°C to + 80°CGet price

2MV gas system.pdf

3. The straightforward way to reduce sf6 gas loss would be to add a vacuum booster to the compressor. At 5 psia compressor inlet pressure, adding a single stage Roots blower with gas cooler to the compressor foreline would only reduce the Marx tank pressure to 2-2.5 psia. This pump/motor/cooler combination would cost approx. $6000 minusGet price

gaz sf6 Gas Recovery Treatment Unit Manufacturer,Vacuum

ACORE can supply sf6 gas Gas Treatment Plant,such as insulating gas gas recovery,purification refilling unit,sf 6 gas vacuum pump machine etc.Get price

Capacitively coupled sf 6, Sulfr hexafluoride/O2, sf6 gas/CH4 plasma etching of

This study investigated dry etching of acrylic in capacitively coupled insulating gas, sf 6/O2 and Sulfr hexafluoride/CH4 plasma under a low vacuum pressure. The process pressure was 100 mTorr and the total gas flow rateGet price

insulating gas gas recovery unit - AGRU-8 series

One High efficiency, 4-pass, air-cooled Sulfr hexafluoride condenser to aid in liquification of sf 6 at higher ambient temperatures. Discharge pressure. One High discharge pressure switch set to automatically shut unit down when it reaches maximum allowable pressure. Vacuum Pump. Motor: 1.1 kW, 1750 RPM, TEFC electric motor. Optionally available 40 m3h-1Get price

Residential Refrigerant Recovery and A/C Tools - Bacharach, Inc.

Bacharach provide a selection of residential refrigerant recovery and air conditioning tools for your needs including the ECO-2020, the fastest AHRI-certified unit in it’s class.Get price

Request Information - Atlas Copco USA

Discover Our Brewery Solutions. Our full suite of compressors, nitrogen generators, vacuum pump products are the perfect fit for every brewery, with the lowest possible cost of ownership.Get price

Surface Tech Sys Multiplex ICP - allwin21 - Google Sites

Ø LEYBOLD 1000 turbo pumps. Ø Remote Gas control Gas Box with 5 gas line configuration-sf6 gas-C4F8-C4F8-O2-Ar. Ø Dry pumps models: QDP80 for process chamber. Ø Edwards 40 Vacuum Pump for loadlock. Ø Helium Back side cooling. Ø Generators : ENI ACG3 for Bias; ACG10 for Coils; VL400 Phase Shift Controller. Ø STS AC Box. Ø STS Purge PanelGet price

Used Plasma-Therm Semiconductor equipment for sale | Machinio

2003 Plasmatherm Plasmatherm. Manufacturer: Plasma-Therm Plasmatherm 790 RIE (Reactive Ion Etcher),Manual load,non-load lock,11" lower electrode, EN 600W RF power supply with matchwork and tuner,Leybold 361C turbo with NT20 controller,Four MFCs (CHF3,CF4,sf 6,N2O,O2)Get price